Coelho, João M. P.Rebordão, José Manuel2010-07-062010-07-062008-01-31Coelho, J.M.P.; Rebordão, J.M. Optical metrology for nanotechnology. In: 2nd Workshop on Low-Dimensional Structures: Properties and Applications, WLDS2008, Aveiro, 31 Jan. - 1 Fev., 2008http://hdl.handle.net/10400.9/782engconference object