Optical metrology for nanotechnology

Coelho, João M. P.; Rebordão, José Manuel

http://hdl.handle.net/10400.9/782

Use this identifier to reference this record.

Name:	Description:	Size:	Format:
Optical METROLOGy.pdf		103.45 KB	Adobe PDF	Download

Send Feedback

Authors

Coelho, João M. P.

Rebordão, José Manuel

URI

http://hdl.handle.net/10400.9/782

Citation

Coelho, J.M.P.; Rebordão, J.M. Optical metrology for nanotechnology. In: 2nd Workshop on Low-Dimensional Structures: Properties and Applications, WLDS2008, Aveiro, 31 Jan. - 1 Fev., 2008

Collections

INETI - Resumos publicados em Livros de Actas

Full item page

Optical metrology for nanotechnology

Authors

Advisor(s)

Abstract(s)

Description

Keywords

URI

Pedagogical Context

Citation

Research Projects

Organizational Units

Journal Issue

Publisher

Collections

CC License