Publication
Optical metrology for nanotechnology
| dc.contributor.author | Coelho, João M. P. | |
| dc.contributor.author | Rebordão, José Manuel | |
| dc.date.accessioned | 2010-07-06T13:56:03Z | |
| dc.date.available | 2010-07-06T13:56:03Z | |
| dc.date.issued | 2008-01-31 | |
| dc.identifier.citation | Coelho, J.M.P.; Rebordão, J.M. Optical metrology for nanotechnology. In: 2nd Workshop on Low-Dimensional Structures: Properties and Applications, WLDS2008, Aveiro, 31 Jan. - 1 Fev., 2008 | pt |
| dc.identifier.uri | http://hdl.handle.net/10400.9/782 | |
| dc.language.iso | eng | pt |
| dc.title | Optical metrology for nanotechnology | pt |
| dc.type | conference object | |
| dspace.entity.type | Publication | |
| oaire.citation.conferencePlace | Aveiro | pt |
| oaire.citation.title | 2nd Workshop on Low-Dimensional Structures: Properties and Applications, WLDS2008 | pt |
| rcaap.rights | openAccess | pt |
| rcaap.type | conferenceObject | pt |